针对条纹投影偏折法中需要多次迭代进行面形恢复，提出一种结合快速傅里叶变换（FFT）算法与泽尼克（Zernike）模式拟合的算法（FFT-尼克）。数值仿真结果表明，直接使用泽尼克模式拟合，需要迭代15次，用时1 min以上，而使用FFT-尼克算法，迭代5次已收敛到理想精度。在保证计算精度在纳米量级的情况下，计算时间也缩短了近2/3。
Abstract
The basic principle of projected fringes deflectometry is to measure the point-o-oint relations of coordinates among free-orm surface, camera and projection screen, and then compute the reconstructed surface with calculated slope data iteratively. In order to reduce the calculating time of the wavefront reconstruction without losing accuracy, a fast Fourier transform(FFT)Zernike combined algorithm was proposed. The simulated result demonstrates the proposed algorithm can decrease the iterative procedure to 5 times using less than 20 seconds, compared with the traditional Zernike modal algorithm which has 15 iteration times using more than 1 minute. In addition, the calculating time is cut by two-hirds with the accuracy achieving the order of nanometer.
关键词
FFT-尼克模式拟合算法 /
模式拟合算法 /
Southwell区域算法 /
条纹投影偏折法 /
光学检测
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Key words
modal method /
optical test /
projected fringes deflectometry /
combined FFT-ernike modal method /
Southwell zonal method
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参考文献
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脚注
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