采用离面位移测量精度达到10 nm~20 nm的电子散斑干涉测量系统验证了双目视觉数字散斑相关测量系统的离面位移测量精度。分别用电子散斑干涉测量系统和双目视觉数字散斑相关测量系统同时测量了平板离面位移，并对所测量的位移最大值进行了分析处理及比较。结果表明，双目视觉数字散斑相关测量系统的物体离面位移分布云图与电子散斑干涉测量系统的结果基本相同，且两者位移均方根相差为2.76 m~3.56 m，相对误差为4.59%~7.60%。因此，当被测量物体的离面位移大于4 m时，双目视觉Q400测量系统精度可达到电子散斑干涉测量系统的精度。
Abstract
Using electronic speckle pattern interferometry measurement system of high accuracy and sensitivity, the measurement accuracy of out-of-plane displacement for binocular vision digital speckle correlation measurement was verified. The maximum out-of-plane displacement was analyzed and compared. The results show that the consistency is good, the difference of two root-mean-square displacements is 2.76 m~3.56 m, the relative error is 4.59%~7.60%. High accuracy can be reached by Q400 when the out-of-plane displacement of measured object is greater than 4 m.
关键词
电子散斑干涉 /
位移 /
测量精度 /
数字散斑相关
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Key words
electronic speckle pattern interferometry /
digital image correlation /
displacement /
measurement accuracy
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参考文献
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脚注
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