双目视觉DIC测量系统的离面位移测量精度

冯秀;陈旭;徐楠;陈凡秀;谢欣;杨连祥

应用光学 ›› 2013, Vol. 34 ›› Issue (3) : 457-462.

应用光学 ›› 2013, Vol. 34 ›› Issue (3) : 457-462.

双目视觉DIC测量系统的离面位移测量精度

  • 冯秀1,2, 陈旭2, 徐楠2, 陈凡秀3,2, 谢欣2, 杨连祥2
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Measurement accuracy of out-of-plane displacement forbinocular vision DIC system

  • FENG Xiu1,2, CHEN Xu2, XU Nan2, CHEN Fan-xiu3,2, XIE Xin2, YANG Lian-xiang2
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摘要

采用离面位移测量精度达到10 nm~20 nm的电子散斑干涉测量系统验证了双目视觉数字散斑相关测量系统的离面位移测量精度。分别用电子散斑干涉测量系统和双目视觉数字散斑相关测量系统同时测量了平板离面位移,并对所测量的位移最大值进行了分析处理及比较。结果表明,双目视觉数字散斑相关测量系统的物体离面位移分布云图与电子散斑干涉测量系统的结果基本相同,且两者位移均方根相差为2.76 m~3.56 m,相对误差为4.59%~7.60%。因此,当被测量物体的离面位移大于4 m时,双目视觉Q400测量系统精度可达到电子散斑干涉测量系统的精度。

Abstract

Using electronic speckle pattern interferometry measurement system of high accuracy and sensitivity, the measurement accuracy of out-of-plane displacement for binocular vision digital speckle correlation measurement was verified. The maximum out-of-plane displacement was analyzed and compared. The results show that the consistency is good, the difference of two root-mean-square displacements is 2.76 m~3.56 m, the relative error is 4.59%~7.60%. High accuracy can be reached by Q400 when the out-of-plane displacement of measured object is greater than 4 m.

关键词

电子散斑干涉 / 位移 / 测量精度 / 数字散斑相关

Key words

electronic speckle pattern interferometry / digital image correlation / displacement / measurement accuracy

引用本文

导出引用
冯秀, 陈旭, 徐楠, 陈凡秀, 谢欣, 杨连祥. 双目视觉DIC测量系统的离面位移测量精度. 应用光学. 2013, 34(3): 457-462
FENG Xiu, CHEN Xu, XU Nan, CHEN Fan-xiu, XIE Xin, YANG Lian-xiang. Measurement accuracy of out-of-plane displacement forbinocular vision DIC system. Journal of Applied Optics. 2013, 34(3): 457-462

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