子孔径拼接技术应用的研究

刘智颖;张磊;胡原;高天元;王志坚

应用光学 ›› 2008, Vol. 29 ›› Issue (6) : 1009-1012.

应用光学 ›› 2008, Vol. 29 ›› Issue (6) : 1009-1012.

子孔径拼接技术应用的研究

  • 刘智颖,张磊,胡原,高天元,王志坚
作者信息 +

Application of sub-aperture stitching technique

  • LIU Zhi-ying,ZHANG Lei,HU Yuan,GAO Tian-yuan,WANG Zhi-jian
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摘要

大口径光学元件的检测开拓了子孔径拼接应用的新领域。采用小口径干涉仪对大口径被测元件不同区域进行波前检测,然后恢复计算出被测波前。使用光学设计软件ZEMAX对子孔径检测拼接技术进行了模拟,模拟结果表明:波前检测相对误差小于4.3λ‰,实现了对大口径光学元件面形的高精度检测,避免了相同口径检测干涉仪的使用,降低了检测成本及难度。

Abstract

The test and measurement of large-aperture optical elements can be made by sub-aperture stitching. The wavefront testing for each area of a largeaperture element under test was performed with a small aperture interferometer, and the wavefront of the large-aperture optical element was calculated according to the sub-aperture stitching results. It is more convenient for large-aperture optical elements to be tested with a small aperture interferometer by sub-aperture stitching method. The simulation of the sub-aperture stitching technology was carried out by the optical design software ZEMAX. The simulated result shows that the relative error of the wavefront testing is less than 4.3λ‰. The high-precision testing for the surface profile of a large-aperture optical element was realized with a small aperture interferometer.

关键词

小口径干涉仪 / 波前检测 / 子孔径拼接 / 大口径光学元件

Key words

large aperture optical component / small aperture interferometer / sub-aperture stitching / wavefront testing

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刘智颖, 张磊, 胡原, 高天元, 王志坚. 子孔径拼接技术应用的研究. 应用光学. 2008, 29(6): 1009-1012
LIU Zhi-ying, ZHANG Lei, HU Yuan, GAO Tian-yuan, WANG Zhi-jian. Application of sub-aperture stitching technique. Journal of Applied Optics. 2008, 29(6): 1009-1012

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