分别利用模拟退火算法和遗传算法在MATLAB 6.5中编写了一个数据处理程序，用来处理VASE椭偏仪在光谱范围为500nm～900nm所测得的椭偏数据。根据VASE椭偏仪的光度法原理，对评价函数方程进行了改进，并选择合适的退火参数和遗传参数进行计算，得到的数据处理结果与仪器处理结果基本一致。最后对两种算法在解决该类问题上的优劣进行了比较。

A data processing program was written in MATLAB 6.5 with the simulated annealing algorithm and genetic algorithm to process the ellipsometry data detected by VASE Ellipsometer in the spectral range of 500nm～900nm. The evaluating function equation was improved according to the photometry principle of VASE Ellipsometer, and some calculations were made with some proper annealing and genetic parameters. The results of the data processing agree with those of the instrument processing. At last, the two algorithms were compared.