一种基于CCD的实时测量光栅常数的方法

付赛;陈海清

应用光学 ›› 2005, Vol. 26 ›› Issue (1) : 53-55.

应用光学 ›› 2005, Vol. 26 ›› Issue (1) : 53-55.

一种基于CCD的实时测量光栅常数的方法

  • 付赛,陈海清
作者信息 +

A New Method Based on CCD to Measure the Constant of Grating

  • FU Sai,CHEN Hai-qing
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摘要

光栅常数是检验光栅质量的重要参数之一.该文介绍了一种实时检测光栅参数的方法,即利用面阵CCD采集光栅衍射图像信息,通过计算衍射±1级光斑与主极大光斑的能量比得出光栅常数.这种方法具有检测速度快、系统简单、精度高等特点,可用于生产线上光栅的实时检测.

Abstract

The constant of grating is one of the most important parameters to assess the quality of grating.A new method to measure the constant of grating is discussed in the paper. The information of a diffractive image is captured by planar-array CCD.The constant of grating can be got by calculating the power ratio of the main facula to the ±1~astafacula.With the advantages of the quick detection, simple structure and high precision,the method can be used in real-time measurement of the quality of gratings in production process.

关键词

实时检测 / 面阵CCD / 光栅常数

Key words

constant of grating / planar-array CCD / real-time measurement

引用本文

导出引用
付赛, 陈海清. 一种基于CCD的实时测量光栅常数的方法. 应用光学. 2005, 26(1): 53-55
FU Sai, CHEN Hai-qing. A New Method Based on CCD to Measure the Constant of Grating. Journal of Applied Optics. 2005, 26(1): 53-55

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