基于空间光调制器的飞秒并行加工方法研究

胡勇涛;翟中生;吕清花;陈列;娄德元;杨奇彪;Peter Bennett;刘顿

应用光学 ›› 2016, Vol. 37 ›› Issue (2) : 315-320.

应用光学 ›› 2016, Vol. 37 ›› Issue (2) : 315-320. DOI: 10.5768/JAO201637.0207003

基于空间光调制器的飞秒并行加工方法研究

  • 胡勇涛1, 翟中生1, 吕清花2, 陈列1, 娄德元1, 杨奇彪1, Peter Bennett1, 刘顿1
作者信息 +

Parallel processing with femtosecond laser using spatial light modulator

  • Hu Yongtao1, Zhai Zhongsheng1, Lyu Qinghua2, Chen Lie1, Lou Deyuan1, Yang Qibiao1, Peter Bennett1, Liu Dun1
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文章历史 +

摘要

针对飞秒激光微加工中能量利用率和加工效率低的问题,提出一种基于空间光调制器的飞秒并行加工方法。在讨论衍射光栅入射角与衍射角关系的基础上,分析了叠加多个衍射光栅产生多光束的原理,运用GS算法对目标多光束进行优化并计算出相应的相位全息图,将该全息图加载到空间光调制器中获得了多光束。采用脉宽100 fs、波长800 nm的飞秒激光,进行聚焦PMMA样品内部的并行加工实验,观察到PMMA上多点组合的一和工字型,得到了光束能量均匀的图形。实验结果论证了该方法对于多光束并行加工控制的有效性。

Abstract

In order to solve the problems of low energy utilization and low efficiency in femtosecond laser micromachining, a new method of femtosecond parallel processing based on spatial light modulator (SLM) was proposed. Based on the discussion of the relationship between incident angle and diffraction angle, the principle of superposition of multiple diffraction gratings was analyzed. Multiple beams were generated by loading the phase holograms calculated using gerchberg and saxton(GS) algorithm on the SLM. The parallel femtosecond laser beam with the pulse width of 100 fs and the wavelength of 800 nm was focused inside a polymethyl methacrylate (PMMA) sample, uniform multipoint patterns of 一 and 工 were observed. Experimental results show that it is an effective method for controlling multibeam parallel processing.

关键词

并行加工 / 空间光调制器 / 多光束 / GS算法 / 激光加工

Key words

laser machining / parallel processing / spatial light modulator / GS algorithm / multibeam

引用本文

导出引用
胡勇涛, 翟中生, 吕清花, 陈列, 娄德元, 杨奇彪, Peter Bennett, 刘顿. 基于空间光调制器的飞秒并行加工方法研究. 应用光学. 2016, 37(2): 315-320 https://doi.org/10.5768/JAO201637.0207003
Hu Yongtao, Zhai Zhongsheng, Lyu Qinghua, Chen Lie, Lou Deyuan, Yang Qibiao, Peter Bennett, Liu Dun. Parallel processing with femtosecond laser using spatial light modulator. Journal of Applied Optics. 2016, 37(2): 315-320 https://doi.org/10.5768/JAO201637.0207003

基金

国家自然科学基金(11204071,51575164);国家科技支撑计划(2015BAF20B03);湖北省自然科学基金(2014CFB596);湖北省科技支撑计划(2015BAA066)

参考文献

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