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Sponsored by: China Association for Science and Technology (CAST)
Editor-In-Chief: Xu Yida
ISSN 1000-1093
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Hosted By: China Ordnance Society
Published By: Acta Armamentarii
CN 11-2176/TJ
Design and Performance Test of a Novel Piezo-scanning Stage
WANG Geng;WANG Shuai-qi
Sponsored by: China Association for Science and Technology (CAST)
Editor-In-Chief: Xu Yida
ISSN 1000-1093
Hosted By: China Ordnance Society
Published By: Acta Armamentarii
CN 11-2176/TJ
Design and Performance Test of a Novel Piezo-scanning Stage
scanningstage / design / test / flexiblemechanism / hysteresisnonlinearity / tracking / control {{custom_keyword}} /
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