Optical Inspection Method for Surface Defects of Micro-components

LI Xiao-zhou;YU Hua-dong;YU Zhang-jiang;LIU Yan;XU Jin-kai

Acta Armamentarii ›› 2011, Vol. 32 ›› Issue (7) : 872-877. DOI: 10.3969/j.issn.1000-1093.2011.07.015
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Optical Inspection Method for Surface Defects of Micro-components

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