Formation of p-Type Silicon-based Deep Macropore Channel Array by Utilizing Electrochemical Etching Technology

Gao Yan-jun;Duan-mu Qing-duo;WANG Guo-zheng;LI Ye;TIAN Jing-quan

Acta Armamentarii ›› 2008, Vol. 29 ›› Issue (12) : 1497-1500. DOI: 10.3969/j.issn.1000-1093.2008.12.017
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Formation of p-Type Silicon-based Deep Macropore Channel Array by Utilizing Electrochemical Etching Technology

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{{article.zuoZheEn_L}}. {{article.title_en}}. {{journal.qiKanMingCheng_EN}}. 2008, 29(12): 1497-1500 https://doi.org/10.3969/j.issn.1000-1093.2008.12.017

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